MKS 925 MicroPirani Vacuum Gauge
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Product Description
MKS 925 MicroPirani vacuum gauge — solid-state Pirani sensor for vacuum measurement. Range 5 × 10⁻⁵ to 100 Torr (7 × 10⁻³ to 1.3 × 10² mbar). Digital display with RS-485 output. Applications: semiconductor process chambers, vacuum coating, freeze-drying, mass-spectrometer inlet monitoring. Solid-state MEMS sensor is more robust than tube Pirani; longer service life on repeated venting cycles. Interchange to Pfeiffer TPR 010/018 and Inficon PSG 500 series.
Technical Specifications
- Material
- Stainless + Inconel filament
- Pressure rating
- 5e-9 to 1000 Torr
- Temperature range
- +10 to +50°C
- IP rating
- Clean-room
- Standards
- EN 837-1
- HS code
- 9026.20
Standards & Compliance
- Material
- Stainless + Inconel filament
- Pressure Rating
- 5e-9 to 1000 Torr
- Temperature Range
- +10 to +50°C
- IP Rating
- Clean-room
- HS Code
- 9026.20
Product Documentation
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Catalogue entry last verified: 2026-08-29. A manufacturer datasheet is attached to this entry — confirm application-critical values against it.
Frequently asked questions
- Where can I buy 925?
- 925 can be ordered from cballast.com as a MKS Instruments catalogue item: request a quotation on this page or email sales@cballast.com, and the order ships worldwide.
- What is the manufacturer part number for this MKS Instruments product?
- The manufacturer part number is 925.
- What is the HS code for 925?
- The customs tariff (HS) code for 925 is 9026.20.
- Who manufactures 925?
- 925 is a MKS Instruments product in the Gauges & Measurement range.
- Is a datasheet available for 925?
- Yes — the 925 datasheet can be viewed and downloaded on this page.
- What is the minimum order quantity for 925?
- The minimum order quantity is 1.
- Is 925 available?
- Yes — 925 is available to order: fulfilment is from supplier stock in cBallast's European network, dispatched directly from the warehouse to the customer, with the exact lead time stated in the quotation (reply within 24 hours).