MKS 925 MicroPirani vacuum gauge — solid-state Pirani sensor for vacuum measurement. Range 5 × 10⁻⁵ to 100 Torr (7 × 10⁻³ to 1.3 × 10² mbar). Digital display with RS-485 output. Applications: semiconductor process chambers, vacuum coating, freeze-drying, mass-spectrometer inlet monitoring. Solid-state MEMS sensor is more robust than tube Pirani; longer service life on repeated venting cycles. Interchange to Pfeiffer TPR 010/018 and Inficon PSG 500 series.